Correction of Spherical Aberration in a Focused Ion Beam...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S03

Correction of Spherical Aberration in a Focused Ion Beam System by Means of Space Charge

Orloff, Jon
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604555666
Date:
August, 2004
File:
PDF, 169 KB
english, 2004
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