Deposition and Integration of a Novel Ultra-Low k (2.2)...

MRS Proceedings 2004 / 1 Vol. 812

Deposition and Integration of a Novel Ultra-Low k (2.2) Material

Schulberg, Michelle T., Humayun, Raashina, Sengupta, Archita, Sun, Jia-Ning
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Volume:
812
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-812-f6.1
Date:
January, 2004
File:
PDF, 912 KB
english, 2004
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