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Frequency response of an electrostatically actuated micro resonator in contact with incompressible fluid
Jabbari, Ghader, Shabani, Rasoul, Rezazadeh, GhaderVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2965-5
Date:
July, 2017
File:
PDF, 1.54 MB
english, 2017