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Photochemistry of azide-phenolic resin photoresists
Michiaki Hashimoto, Takao Iwayanagi, Hiroshi Shiraishi, Saburo NonogakiVolume:
26
Year:
1986
Language:
english
Pages:
6
DOI:
10.1002/pen.760261603
File:
PDF, 717 KB
english, 1986