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Poly(alkenylsilane sulfone)s as positive electron beam resists for two-layer systems
Antoni S. Gozdz, Harold G. Craighead, Murrak J. BowdknVolume:
26
Year:
1986
Language:
english
Pages:
6
DOI:
10.1002/pen.760261609
File:
PDF, 822 KB
english, 1986