Two-photon laser-assisted device alteration in CMOS...

Two-photon laser-assisted device alteration in CMOS integrated circuits using linearly, circularly and radially polarized light

Rutkauskas, M., Farrell, C., Dorrer, C., Marshall, K.L., Crawford, T., Lundquist, T.R., Vedagarbha, P., Erington, K., Bodoh, D., Reid, D.T.
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Volume:
60
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2016.02.007
Date:
May, 2016
File:
PDF, 796 KB
english, 2016
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