Structure stability of high aspect ratio Ti/Au two-layer...

Microelectronic Engineering 2016 / 06 Vol. 159

Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers

Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Konishi, Toshifumi, Machida, Katsuyuki, Toshiyoshi, Hiroshi, Yamane, Daisuke, Masu, Kazuya, Sone, Masato
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Volume:
159
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.02.054
Date:
June, 2016
File:
PDF, 1.19 MB
english, 2016
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