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High-precision Positioning System using a Low-stiffness Dual Stage Actuator
Ito, Shingo, Steininger, Juergen, Chang, Peter I., Schitter, GeorgVolume:
46
Year:
2013
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20130410-3-cn-2034.00025
File:
PDF, 831 KB
english, 2013