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Electrical contact performance of MEMS acceleration switch fabricated by UV-LIGA technology
Zhou, Zhijian, Nie, Weirong, Xi, Zhanwen, Wang, XiaofengVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2621-5
Date:
October, 2015
File:
PDF, 1.25 MB
english, 2015