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Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector
Ha, Thi Dep, Bao, JingFuVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2678-1
Date:
April, 2016
File:
PDF, 2.80 MB
english, 2016