Selectivity enhancement by hydrogen addition in selective area metal-organic vapor phase epitaxy of GaN and InGaN
Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki NakanoVolume:
207
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssa.200983606
File:
PDF, 407 KB
english, 2010