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Generation of dislocations in annealed silicon wafers under applied stress
M. V. Mezhennyi, M. G. Milvidskii, V. Ya. Reznik, R. J. FalsterVolume:
2
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/pssc.200460538
File:
PDF, 207 KB
english, 2005