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Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy
K. Tonisch, V. Cimalla, Ch. Foerster, D. Dontsov, O. AmbacherVolume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565123
File:
PDF, 232 KB
english, 2006