Polishing and characterization of thick AlN layers grown on...

physica status solidi (c) 2006 Vol. 3; Iss. 6

Polishing and characterization of thick AlN layers grown on SiC substrates by stress control hydride vapor phase epitaxy

H. Mank, B. Amstatt, D. Turover, E. Bellet-Amalric, B. Daudin, V. Ivantsov, V. Dmitriev, V. Maslennikov
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Volume:
3
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/pssc.200565151
File:
PDF, 214 KB
english, 2006
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