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AlGaN metal-semiconductor-metal structure for pressure sensing applications
Z. Hassan, Y. C. Lee, S. S. Ng, F. K. Yam, Y. Liu, Z. Rang, M. Z. Kauser, P. P. Ruden, M. I. NathanVolume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565155
File:
PDF, 349 KB
english, 2006