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Doping efficiency and segregation of Si in AlN grown by molecular beam epitaxy
V. Lebedev, F. M. Morales, H. Romanus, G. Ecke, V. Cimalla, M. Himmerlich, S. Krischok, J. A. Schaefer, O. AmbacherVolume:
3
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/pssc.200565178
File:
PDF, 177 KB
english, 2006