Optical cavity formation on GaN using a conventional RIE...

physica status solidi (c) 2006 Vol. 3; Iss. 6

Optical cavity formation on GaN using a conventional RIE system

F. G. Kalaitzakis, G. Konstantinidis, K. Tsagaraki, M. Androulidaki, N. T. Pelekanos
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Volume:
3
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/pssc.200565281
File:
PDF, 350 KB
english, 2006
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