Growth of AlN films and their characterization

physica status solidi (c) 2006 Vol. 3; Iss. 6

Growth of AlN films and their characterization

Rakesh B. Jain, Ying Gao, Jianping Zhang, R. S. Qhaleed Fareed, Remis Gaska, Jiawei Li, Arulchakkravarthi Arjunan, Edmundas Kuokstis, Jinwei Yang, M. Asif Khan
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Volume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565371
File:
PDF, 329 KB
english, 2006
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