Critical aspects of high temperature MOCVD growth of AlN...

physica status solidi (c) 2006 Vol. 3; Iss. 6

Critical aspects of high temperature MOCVD growth of AlN epilayers on 6H-SiC substrates

K. Balakrishnan, N. Fujimoto, T. Kitano, A. Bandoh, M. Imura, K. Nakano, M. Iwaya, S. Kamiyama, H. Amano, I. Akasaki, T. Takagi, T. Noro, K. Shimono, T. Riemann, J. Christen
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565387
File:
PDF, 204 KB
english, 2006
Conversion to is in progress
Conversion to is failed