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Fabrication of GaN-based striped structures along the direction by the combination of RIE dry-etching and KOH wet-etching techniques to recover dry-etching damage
Morimichi Itoh, Toru Kinoshita, Koji Kawasaki, Misaichi Takeuchi, Choshiro Koike, Yoshinobu AoyagiVolume:
3
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/pssc.200565392
File:
PDF, 444 KB
english, 2006