Microfabrication of GaN groove on sapphire substrate...

physica status solidi (c) 2006 Vol. 3; Iss. 6

Microfabrication of GaN groove on sapphire substrate treated selectively by electron-beam

H. Matsumura, M. Sumiya, Y. Kawai, M. Tomiki, K. Murakami, S. Fuke
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Volume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565409
File:
PDF, 354 KB
english, 2006
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