AlGaN epitaxial layers grown by HVPE on sapphire substrates

AlGaN epitaxial layers grown by HVPE on sapphire substrates

V. Soukhoveev, O. Kovalenkov, L. Shapovalova, V. Ivantsov, A. Usikov, V. Dmitriev, V. Davydov, A. Smirnov
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Volume:
3
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/pssc.200565453
File:
PDF, 230 KB
english, 2006
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