SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Design for Manufacturability through Design-Process Integration - Improving the power-performance of multicore processors through optimization of lithography and thermal processing
Gabor, A. H., Wong, Alfred K. K., Singh, Vivek K., Brunner, T., Bukofsky, S., Butt, S., Clougherty, F., Deshpande, S., Faure, T., Gluschenkov, O., Greene, K., Johnson, J., Le, N, Lindo, P., MahorowalaVolume:
6521
Year:
2007
Language:
english
DOI:
10.1117/12.711750
File:
PDF, 394 KB
english, 2007