Dislocation structure in interfaces between Si wafers with...

Dislocation structure in interfaces between Si wafers with hybrid crystal orientation

Vladimir Vdovin, Nikolai Zakharov, Eckhard Pippel, Peter Werner, Mikhail Milvidskii, Mike Ries, Mike Seacrist, Robert Falster
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Volume:
6
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/pssc.200881431
File:
PDF, 1.34 MB
english, 2009
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