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Dislocation structure in interfaces between Si wafers with hybrid crystal orientation
Vladimir Vdovin, Nikolai Zakharov, Eckhard Pippel, Peter Werner, Mikhail Milvidskii, Mike Ries, Mike Seacrist, Robert FalsterVolume:
6
Year:
2009
Language:
english
Pages:
6
DOI:
10.1002/pssc.200881431
File:
PDF, 1.34 MB
english, 2009