Proton backscattering by point and extended defects in...

physica status solidi (c) 2009 Vol. 6; Iss. 8

Proton backscattering by point and extended defects in ion-implanted Si

Nikolay Sobolev, Vladimir Sakharov, Igor Serenkov, Anton Kalyadin, Vladimir Vdovin
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Volume:
6
Year:
2009
Language:
english
Pages:
4
DOI:
10.1002/pssc.200881463
File:
PDF, 102 KB
english, 2009
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