Formation mechanism of Al-depleted bands in MOVPE-AlGaN...

physica status solidi (c) 2010 Vol. 7; Iss. 7-8

Formation mechanism of Al-depleted bands in MOVPE-AlGaN layer on GaN template with trenches

Noriyuki Kuwano, Tetsuya Ezaki, Takuya Kurogi, Hideto Miyake, Kazumasa Hiramatsu
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Volume:
7
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssc.200983424
File:
PDF, 659 KB
english, 2010
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