Study of Si implantation into Mg-doped GaN for MOSFETs
Clemens Ostermaier, Sang-Il Ahn, Kay Potzger, Manfred Helm, Jan Kuzmik, Dionyz Pogany, Gottfried Strasser, Jong-Ho Lee, Sung-Ho Hahm, Jung-Hee LeeVolume:
7
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssc.200983534
File:
PDF, 128 KB
english, 2010