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Analysis of pulsed injection of precursors in AlN-MOVPE growth by computational fluid simulation
Kenichi Nakamura, Akira Hirako, Kazuhiro OhkawaVolume:
7
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/pssc.200983580
File:
PDF, 156 KB
english, 2010