In situ SiN passivation of AlInN/GaN heterostructures by MOVPE
H. Behmenburg, L. Rahimzadeh Khoshroo, C. Mauder, N. Ketteniss, K. H. Lee, M. Eickelkamp, M. Brast, D. Fahle, J. F. Woitok, A. Vescan, H. Kalisch, M. Heuken, R. H. JansenVolume:
7
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssc.200983599
File:
PDF, 113 KB
english, 2010