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Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators
F. Niebelschuetz, K. Brueckner, K. Tonisch, R. Stephan, V. Cimalla, O. Ambacher, M. A. HeinVolume:
7
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssc.200983616
File:
PDF, 204 KB
english, 2010