Temperature control of multiple wafers during etching of 2′...

Temperature control of multiple wafers during etching of 2′ sapphire wafers for patterned sapphire substrates (PSS)

Mark Dineen, Zhong Ren
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Volume:
7
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssc.200983631
File:
PDF, 221 KB
english, 2010
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