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Reducing the warpage and dislocation density of GaN template grown by HVPE with gallium droplet treatment
Young Jun Choi, Hae-Kon Oh, Jung-Gyu Kim, Hyun-Hee Hwang, Hae-Yong Lee, Won-Jae Lee, Byoung-Chul Shin, Jonghee HwangVolume:
7
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/pssc.200983632
File:
PDF, 710 KB
english, 2010