Comparative thickness measurements of SiO2/Si films for...

Surface and Interface Analysis 2004 Vol. 36; Iss. 1

Comparative thickness measurements of SiO2/Si films for thicknesses less than 10 nm

T. Jach, J. A. Dura, N. V. Nguyen, J. Swider, G. Cappello, C. Richter
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Volume:
36
Year:
2004
Language:
english
Pages:
7
DOI:
10.1002/sia.1641
File:
PDF, 246 KB
english, 2004
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