Aberration analysis of Cs-corrector system with twin hexapoles and transfer lens doublet in scanning transmission electron microscope by simple ray tracing based on geometrical optics
Tadahiro Kawasaki, Mikio Ichihashi, Takaomi Matsutani, Yoshihide Kimura, Takashi IkutaVolume:
40
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/sia.2957
File:
PDF, 155 KB
english, 2008