Large boron-interstitial cluster modelling in BF 3 plasma implanted silicon
Essa, Z., Cristiano, F., Spiegel, Y., Qiu, Y., Boulenc, P., Quillec, M., Taleb, N., Zographos, N., Bedel-Pereira, E., Mortet, V., Burenkov, A., Hackenberg, M., Torregrosa, F., Tavernier, C.Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300165
Date:
January, 2014
File:
PDF, 219 KB
english, 2014