On an improved boron segregation calibration from a...

Physica status solidi 2014 / 01 Vol. 11; Iss. 1

On an improved boron segregation calibration from a particularly sensitive power MOS process

Koffel, S., Burenkov, A., Sekowski, M., Pichler, P., Giubertoni, D., Bersani, M., Knaipp, M., Wachmann, E., Schrems, M., Yamamoto, Y., Bolze, D.
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Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300152
Date:
January, 2014
File:
PDF, 152 KB
english, 2014
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