Surface evolution of very high dose arsenic implants in...

Surface evolution of very high dose arsenic implants in silicon formed by plasma immersion ion implantation - a long term study

Meirer, Florian, Demenev, Evgeny, Giubertoni, Damiano, Vanzetti, Lia, Gennaro, Salvatore, Fedrizzi, Michele, Pepponi, Giancarlo, Steinhauser, Georg, Vishwanath, Vinayak, Foad, Majeed, Bersani, Massimo
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Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300160
Date:
January, 2014
File:
PDF, 518 KB
english, 2014
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