Crosstalk suppression of CMOS compatible AlN based SAW devices on low resistive Si(100)
Kaletta, Udo Ch., Wolansky, D., Wipf, M. Fraschke Ch., Wenger, Ch.Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300194
Date:
February, 2014
File:
PDF, 373 KB
english, 2014