Impedance spectroscopy of polysilicon in SOI structures

Physica status solidi 2014 / 01 Vol. 11; Iss. 1

Impedance spectroscopy of polysilicon in SOI structures

Druzhinin, Anatoly, Ostrovskii, Ihor, Khoverko, Yuriy, Nichkalo, Stepan, Kogut, Iurii
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Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300149
Date:
January, 2014
File:
PDF, 303 KB
english, 2014
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