Resistivity changes of low resistivity Si substrates by...

Physica status solidi 2014 / 01 Vol. 11; Iss. 1

Resistivity changes of low resistivity Si substrates by rapid thermal processing and subsequent annealing

Zhang, X., Ma, X., Gao, C., Xu, T., Zhao, J., Dong, P., Vanhellemont, J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300107
Date:
January, 2014
File:
PDF, 183 KB
english, 2014
Conversion to is in progress
Conversion to is failed