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Optimization of structures of DC RF MEMS series switches for low actuation
S, Lakshmi, Manohar, Premila, P, Naga SayanuVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3063-4
Date:
July, 2017
File:
PDF, 1.71 MB
english, 2017