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Design and experimental validation of a linear piezoelectric micromotor for dual-slider positioning
Peng, Yuxin, Wang, Huiying, Wang, Shu, Wang, Jian, Cao, Jie, Yu, HaoyongVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3088-8
Date:
July, 2017
File:
PDF, 1.08 MB
english, 2017