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A resonant microstructure tunability analysis for an out-of-plane capacitive detection MEMS magnetometer
Said, Mohamed Hadj, Tounsi, Farès, Gkotsis, Petros, Mezghani, Brahim, Francis, Laurent A.Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3093-y
Date:
July, 2017
File:
PDF, 1.15 MB
english, 2017