Thermal behavior modeling and characteristics analysis of electrothermal microactuators
Shan, Tiqiang, Qi, Xinglin, Cui, Liang, Zhou, XiaodongVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3070-5
Date:
July, 2017
File:
PDF, 2.59 MB
english, 2017