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Quantitative analysis of temperature effect on SOI piezoresistive pressure sensors
Belwanshi, Vinod, Topkar, AnitaVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3102-1
Date:
July, 2017
File:
PDF, 843 KB
english, 2017