Study of Oxygen Concentration in TMAH Solution for...

Solid State Phenomena 2016 / 9 Vol. 255

Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process

He, Yong Gen, Liu, Huan Xin, Liu, Jia Lei, Wu, Jin Gang, Haigermoser, Christian, Liu, Feng, Zhou, Mei Sheng, Lu, Wei
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.18
Date:
September, 2016
File:
PDF, 399 KB
english, 2016
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