Towards Atomic-Layer-Scale Processing of High Mobility...

Solid State Phenomena 2016 / 9 Vol. 255

Towards Atomic-Layer-Scale Processing of High Mobility Channel Materials in Acidic Solutions for N5 and N7 Technology Nodes

van Dorp, Dennis H., Arnauts, Sophia, Abrenica, Graniel, Holsteyns, Frank
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.51
Date:
September, 2016
File:
PDF, 433 KB
english, 2016
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