Characterization of Etch Residues Generated on Damascene...

Solid State Phenomena 2016 / 9 Vol. 255

Characterization of Etch Residues Generated on Damascene Structures

Le, Quoc Toan, Kesters, Els, Hoflijk, I., Conard, T., Shen, M., Braun, S., Burk, Y., Holsteyns, Frank
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Volume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.227
Date:
September, 2016
File:
PDF, 394 KB
english, 2016
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