Titanium Nitride Hard Mask Removal with Selectivity to Tungsten in FEOL
Wu, Hsing Chen, Tu, Sheng Hung, Yang, Min Chieh, Cooper, EmanuelVolume:
255
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.255.91
Date:
September, 2016
File:
PDF, 274 KB
english, 2016