Control of HF Volatile Contamination in FOUP Environment by...

Solid State Phenomena 2014 / 9 Vol. 219

Control of HF Volatile Contamination in FOUP Environment by Advanced Polymers and Clean Gas Purge

González-Aguirre, Paola, Fontaine, Hervé, Beitia, Carlos, Ohlsen, Jim, Lundgren, Jorgen
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Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.219.247
Date:
September, 2014
File:
PDF, 1.23 MB
english, 2014
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